ALD/MLD coating of patterned vertically aligned carbon nanotube micropillars with Fe-NH<sub>2</sub>TP hybrids-Reference-Cited by-同舟云学术

ALD/MLD coating of patterned vertically aligned carbon nanotube micropillars with Fe-NH₂TP hybrids

Published:2023 Issue:24 Volume:15 Page:10423-10429
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Silva R. M.¹^ORCID,Rocha J.²^ORCID,Silva R. F.¹^ORCID

Affiliation:

1. CICECO – Aveiro Institute of Materials, Department of Materials and Ceramic Engineering, University of Aveiro, 3810-193 Aveiro, Portugal

2. CICECO – Aveiro Institute of Materials, Department of Chemistry, University of Aveiro, 3810-193 Aveiro, Portugal

Abstract

Iron 2-amino terephthalate thin films were fabricated by ALD/MLD. Patterned vertically aligned carbon nanotube micropillars were coated by ALD/MLD. The iron 2-amino terephthalate ALD/MLD films exhibit hydrophobic properties.

Funder

Ministério da Ciência, Tecnologia e Ensino Superior

Fundação para a Ciência e a Tecnologia

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2023/NR/D3NR01610B

Reference30 articles.

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1. Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements;Advanced Materials Interfaces;2024-08-23

2. Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films;Chemistry of Materials;2024-06-25