1. Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province
2. School of Engineering
3. Westlake University
4. Hangzhou 310024
5. China
6. Key Laboratory of Wide Band Gap Semiconductor Technology
7. School of Microelectronics
8. Xidian University
9. Xi'an 710071
10. Key Laboratory of Microelectronic Devices and Integrated Technology
11. Institute of Microelectronics of Chinese Academy of Sciences
12. Beijing 100029