Anisotropic silicon nanowire arrays fabricated by colloidal lithography

Author:

Rey Marcel12345ORCID,Wendisch Fedja Jan6789,Aaron Goerlitzer Eric Sidney1234ORCID,Julia Tang Jo Sing123410,Bader Romina Sigrid1234,Bourret Gilles Remi6789ORCID,Vogel Nicolas1234ORCID

Affiliation:

1. Institute of Particle Technology

2. Friedrich-Alexander University Erlangen-Nürnberg

3. 91058 Erlangen

4. Germany

5. Department of Physics and Astronomy

6. Department of Chemistry and Physics of Materials

7. University of Salzburg

8. A-5020 Salzburg

9. Austria

10. Department of Biofunctionalized Materials and (Glyco)Biotechnology

Abstract

We demonstrate the design of silicon nanowire arrays with tunable elliptical cross-sections. Their anisotropic character of the individual pillars affords defined bending or bundling of the arrays.

Funder

Austrian Science Fund

Deutsche Forschungsgemeinschaft

Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung

Publisher

Royal Society of Chemistry (RSC)

Subject

General Engineering,General Materials Science,General Chemistry,Atomic and Molecular Physics, and Optics,Bioengineering

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