Synthesis of indium oxide microparticles using aerosol assisted chemical vapour deposition
Author:
Affiliation:
1. Department of Materials
2. The University of Manchester
3. Manchester
4. UK
5. Department of Chemistry
Abstract
Microparticles of indium oxide (In2O3) are deposited on glass substrates at 500 °C using aerosol assisted chemical vapour deposition (AACVD).
Funder
Engineering and Physical Sciences Research Council
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2020/RA/D0RA02678F
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4. Low-Temperature, High-Performance, Solution-Processed Indium Oxide Thin-Film Transistors
5. Tantalum and Titanium doped In2O3 Thin Films by Aerosol-Assisted Chemical Vapor Deposition and their Gas Sensing Properties
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