1. Institute of Microelectronics, Chinese Academy of Sciences, 100029 Beijing, China
2. State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
3. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
4. College of Microelectronics, University of Chinese Academy of Sciences, 100049 Beijing, China
5. Yangtze Memory Technologies Co., Ltd (YMTC), 430205 Wuhan, China