Synthesis of Mg and Zn diolates and their use in metal oxide deposition

Author:

Frenzel Peter12345,Preuß Andrea12345,Bankwitz Jörn6785,Georgi Colin6785,Ganss Fabian12945,Mertens Lutz1210114,Schulz Stefan E.67851,Hellwig Olav12945,Mehring Michael1210114ORCID,Lang Heinrich12345ORCID

Affiliation:

1. Technische Universität Chemnitz

2. Faculty of Natural Sciences

3. Institute of Chemistry, Inorganic Chemistry

4. D-09107 Chemnitz

5. Germany

6. Fraunhofer Institute for Electronic Nano Systems (ENAS)

7. Technologie-Campus 3

8. D-09126 Chemnitz

9. Institute of Physics

10. Institute of Chemistry

11. Coordination Chemistry

Abstract

Mg and Zn containing precursors for the generation of metal oxide layers by CVD and/or spin-coating are described.

Funder

Deutsche Forschungsgemeinschaft

Technische Universität Chemnitz

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

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