1. State Key Laboratory for Manufacturing Systems Engineering
2. International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology
3. Xi’an Jiaotong University
4. Xi’an 710049
5. China
6. Electronic Materials Research Laboratory
7. Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering
8. State Key Laboratory for Mechanical Behavior of Materials
9. Department of Materials Science and Engineering
10. College of Engineering
11. Peking University
12. Beijing
13. Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System