New heteroleptic magnesium complexes for MgO thin film application-Reference-Cited by-同舟云学术

New heteroleptic magnesium complexes for MgO thin film application

Published:2015 Issue:5 Volume:44 Page:2103-2109
ISSN:1477-9226
Container-title:Dalton Transactions
language:en
Short-container-title:Dalton Trans.

Author:

Kim Hyo-Suk¹²³⁴⁵,George Sheby Mary¹²³⁴,Park Bo Keun¹²³⁴,Son Seung Uk⁵⁶⁷⁴,Kim Chang Gyoun¹²³⁴,Chung Taek-Mo¹²³⁴

Affiliation:

1. Thin Film Materials Research Group

2. Korea Research Institute of Chemical Technology

3. Daejeon 305-600

4. Republic of Korea

5. Department of Chemistry and Department of Energy Science

6. Sungkyunkwan University

7. Suwon 440-746

Abstract

Novel magnesium precursors for the ALD/CVD process of MgO thin films were synthesized as heteroleptic complexes. These complexes show high volatility and good thermal properties which proved to be superior to homoleptic parent complexes.

Publisher

Royal Society of Chemistry (RSC)

Subject

Inorganic Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/DT/C4DT03497J

Reference39 articles.

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