A hybrid YSZ/SnO2/MEMS SO2 gas sensor
Author:
Affiliation:
1. Department of Electronic Engineering
2. National Kaohsiung University of Science and Technology
3. Kaohsiung 807
4. Taiwan
5. Institute of Microelectronics
6. Department of Electrical Engineering
7. National Cheng Kung University
8. Tainan 701
Abstract
This study uses a solid YSZ electrolyte film in a SnO2 MEMS SO2 gas sensor of the semiconductor type to enhance the redox reaction.
Funder
Ministry of Science and Technology, Taiwan
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2019/RA/C9RA03607E
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1. Ammonia Pollution From Farming May Exact Hefty Health Costs
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