New generation copper-based interconnection from nanoporous CuSn alloy film sintered at low temperatures
Author:
Affiliation:
1. Department of Chemistry, Binghamton University, SUNY P.O. Box 6000, Binghamton, New York, 13902, USA
Abstract
Funder
Semiconductor Research Corporation
Publisher
Royal Society of Chemistry (RSC)
Link
http://pubs.rsc.org/en/content/articlepdf/2024/MA/D3MA01071F
Reference44 articles.
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3. P.Liu , Fundamentals of Electromigration in Interconnects of 3D Packaging , in 3D Microelectronic Packaging: From Fundamentals to Applications , ed Y. Li and D. Goyal , Springer International Publishing , Cham , 2017 , pp. 223–244 , 10.1007/978-3-319-44586-1_9
4. A Review of Nanoporous Metals in Interconnects
5. K.Croes , C.Adelmann , C. J.Wilson , H.Zahedmanesh , O. V.Pedreira , C.Wu , A.Leśniewska , H.Oprins , S.Beyne , I.Ciofi , D.Kocaay , M.Stucchi and Z.Tőkei , Presented in part at the 2018 IEEE International Electron Devices Meeting (IEDM) , 2018 , 5.3.15.3.4
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