Crystallization behaviors of ZnxSb100−x thin films for ultralong data retention phase change memory applications

Author:

Chen Yimin1234,Wang Guoxiang1234,Shen Xiang1234,Xu Tiefeng1234,Wang R. P.567,Wu Liangcai8910,Lu Yegang1234,Li Junjian1234,Dai Shixun1234,Nie Qiuhua1234

Affiliation:

1. Laboratory of Infrared Material and Devices

2. Advanced Technology Research Institute

3. Ningbo University

4. Ningbo 315211, China

5. Laser Physics Centre

6. Australian National University

7. Canberra, Australia

8. Shanghai Institute of Micro-system and Information Technology

9. Chinese Academy of Sciences

10. Shanghai 200050, China

Abstract

ZnSb films have higher crystallization temperature (~257 °C), larger crystalline activation energy (~5.63 eV), better 10 year-data-retention (~201 °C) and lower melting temperature (~500 °C).

Publisher

Royal Society of Chemistry (RSC)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

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