1. Advanced Research Institute for Multidisciplinary Science, Beijing Institute of Technology, Beijing 100081, China
2. Center for Interdisciplinary Science of Optical Quantum and NEMS Integration, Beijing Institute of Technology, 100081 Beijing, China
3. Yangtze Delta Region Academy of Beijing Institute of Technology, Jiaxing 314003, China
4. School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
5. State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
6. National Key Laboratory for Electronic Measurement Technology, School of Instrument and Electronics, North University of China, Taiyuan 030051, China