Electrothermal vaporization–inductively coupled plasma mass spectrometry for the analysis of semiconductor-grade organometallic materials and process chemicals
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Spectroscopy,Analytical Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/1994/JA/JA9940901371
Reference33 articles.
1. Determination of trace elements in trimethylgallium by electrothermal atomisation atomic absorption spectrometry and inductively coupled plasma atomic emission spectrometry
2. Analysis of trimethylgallium with inductively coupled plasma spectrometry
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