Wafer-scale, highly uniform, and well-arrayed suspended nanostructures for enhancing the performance of electronic devices-Reference-Cited by-同舟云学术

Wafer-scale, highly uniform, and well-arrayed suspended nanostructures for enhancing the performance of electronic devices

Published:2022 Issue:4 Volume:14 Page:1136-1143
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Zhao Zhi-Jun¹,Ahn Junseong²³^ORCID,Lee Dongheon⁴,Jeong Chan Bae⁵,Kang Mingu³,Choi Jungrak³,Bok Moonjeong²,Hwang Soonhyoung²,Jeon Sohee²,Park Sooyeon⁴,Ko Jiwoo²³,Chang Ki Soo⁵,Choi Jung-Woo⁴,Park Inkyu³^ORCID,Jeong Jun-Ho²^ORCID

Affiliation:

1. Institute of Smart City and Intelligent Transportation, Southwest Jiaotong University, No. 999 Pidu District, Chengdu, Sichuan, China

2. Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea

3. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea

4. School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea

5. Center for Scientific Instrumentation, Korea Basic Science Institute (KBSI), Daejion 34133, Republic of Korea

Abstract

Wafer-scale, highly uniform, well-arrayed suspended nanostructures play an important role in enhancing the performance of a diverse group of nanodevices.

Funder

National Research Foundation of Korea

Ministry of Science, ICT and Future Planning

Ministry of Science and ICT, South Korea

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2022/NR/D1NR07375C

Reference51 articles.

1. Palladium-Decorated Silicon Nanomesh Fabricated by Nanosphere Lithography for High Performance, Room Temperature Hydrogen Sensing