Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition

Author:

Zhao Yu12345,Lee Hyunjea6234,Choi Woong7894,Fei Weidong5101112,Lee Cheol Jin12346ORCID

Affiliation:

1. Department of Micro/Nano Systems

2. Korea University

3. Seoul 02841

4. Korea

5. School of Materials Science and Engineering

6. School of Electrical Engineering

7. School of Advanced Materials Engineering

8. Kookmin University

9. Seoul 02707

10. Harbin Institute of Technology

11. Harbin 150001

12. PR China

Abstract

We report the synthesis of large-area monolayer MoSe2 films extended up to a millimeter scale on SiO2/Si substrates by atmospheric pressure chemical vapor deposition (CVD).

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

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