Chemical engineering of a birefringent crystal transparent in the deep UV range
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2012/CE/C2CE25240F
Reference21 articles.
1. Polarimetry of illumination for 193nm immersion lithography
2. Polarization-selective subwavelength grating used with 193nm light
3. Photodissociation of Propargyl Chloride at 193 nm
4. Photodissociation dynamics of ClN3 at 193nm
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