Electrically active and hydrogen passivated Zn in GaAs/AlGaAs specifically distinguished during secondary ion mass spectrometry depth profiling-Reference-Cited by-同舟云学术

Electrically active and hydrogen passivated Zn in GaAs/AlGaAs specifically distinguished during secondary ion mass spectrometry depth profiling

Published:2021 Issue:1 Volume:36 Page:178-184
ISSN:0267-9477
Container-title:Journal of Analytical Atomic Spectrometry
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Wójcik Adrianna¹²³⁴⁵^ORCID,Kolkowski Walery⁶⁷³,Pasternak Iwona⁶⁷³⁵⁸,Strupiński Włodzimierz⁶⁷³⁵⁸,Kozdra Sylwia¹²³^ORCID,Michałowski Paweł Piotr¹²³^ORCID

Affiliation:

1. Łukasiewicz Research Network - Institute of Microelectronics and Photonics

2. 02-668 Warsaw

3. Poland

4. Institute of Experimental Physics

5. Faculty of Physics

6. VIGO SYSTEM

7. 05-850 Ożarów Mazowiecki

8. Warsaw University of Technology

Abstract

A novel method of measuring active and hydrogen-passivated (inactive) impurity depth profiles using Secondary Ion Mass Spectrometry.

Funder

Narodowe Centrum Badan i Rozwoju

Narodowe Centrum Nauki

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2021/JA/D0JA00369G

Reference53 articles.

1. A Spreading Resistance Technique for Resistivity Measurements on Silicon

2. High Speed Implementation and Experimental Evaluation of Multilayer Spreading Resistance Analysis

3. Automatic generation of shallow electrically active dopant profiles from spreading resistance measurements

4. Characterization of ultrashallow dopant profiles using spreading resistance profiling

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