Influence of laser nanostructured diamond tools on the cutting behavior of silicon by molecular dynamics simulation-Reference-Cited by-同舟云学术

Influence of laser nanostructured diamond tools on the cutting behavior of silicon by molecular dynamics simulation

Published:2017 Issue:25 Volume:7 Page:15596-15612
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Dai Houfu¹²³⁴⁵^ORCID,Chen Genyu⁵⁶⁷⁸⁹,Li Shaobo¹²³⁴,Fang Qihong⁵⁶⁷⁸,Hu Bang⁵⁶⁷⁸⁹

Affiliation:

1. College of Mechanical Engineering

2. Guizhou University

3. Guiyang 550025

4. China

5. State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body

6. Hunan University

7. Changsha 410082

8. PR China

9. Institute of Laser Technology

Abstract

In this study, a series of large-scale molecular dynamics simulations have been performed to study the nanometric cutting of single crystal silicon with a laser-fabricated nanostructured diamond tool.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/RA/C6RA27070K

Reference51 articles.

1. Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel

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3. Micro/nanometric investigations of the effects of laser ablation in the generation of micro-tools from solid CVD diamond structures

4. On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

5. Modelling and experimental investigation on nanometric cutting of monocrystalline silicon

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