Laser ablation ICP-MS to determine Cu on a Si wafer prepared by ion sputtering
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Spectroscopy,Analytical Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2011/JA/C0JA00143K
Reference22 articles.
1. Study on the determination of contamination by Cu particles on silicon wafer surfaces
2. Solid sample analysis using laser ablation inductively coupled plasma mass spectrometry
3. The synergy of elemental and biomolecular mass spectrometry: new analytical strategies in life sciences
4. Time-resolved studies of particle effects in laser ablation inductively coupled plasma-mass spectrometry : Part 1. Investigation of nanosecond and femtosecond pulse width lasers and devices for particle size selection
5. Standardless Semiquantitative Analysis of Metals Using Single-Shot Laser Ablation Inductively Coupled Plasma Time-of-Flight Mass Spectrometry
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