1. CONACYT – Center for Engineering and Industrial Development
2. CIDESI
3. Micro-Electro-Mechanical Systems Department (MEMS)
4. 76125 Santiago de Querétaro
5. Mexico
6. Department of Electric, Electronic and Automatic Control
7. Universitat Rovira i Virgili
8. Tarragona
9. Spain
10. UPIITA
11. Instituto Politécnico Nacional
12. Mexico City
13. México
14. Institute of Chemical Research of Catalonia (ICIQ-BIST)
15. 43007 Tarragona
16. Solid State Electronics Section
17. Department of Electrical Engineering
18. Center for Research and Advanced Studies of National Polytechnic Institute
19. CINVESTAV-IPN