Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition-Reference-Cited by-同舟云学术

Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Published:2017 Issue:42 Volume:9 Page:16349-16356
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Lewis Brett B.¹²³⁴^ORCID,Mound Brittnee A.¹²³⁴^ORCID,Srijanto Bernadeta⁵⁶⁷⁴,Fowlkes Jason D.¹²³⁴⁵,Pharr George M.¹²³⁴⁵,Rack Philip D.¹²³⁴⁵

Affiliation:

1. Department of Materials Science and Engineering

2. University of Tennessee

3. Knoxville

4. USA

5. Center for Nanophase Materials Sciences

6. Oak Ridge National Laboratory

7. Oak Ridge

Abstract

Nanomechanical measurements of platinum–carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging.

Funder

National Science Foundation

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2017/NR/C7NR05274J

Reference49 articles.

1. Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition

2. Three dimensional magnetic nanowires grown by focused electron-beam induced deposition

3. Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition