1. Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, 361102, China
2. The State Key Laboratory of Fluid Power & Mechatronic Systems, Zhejiang University, Hangzhou 310027, China
3. AECC Gui Zhou Liyang Aviation Power Co., Ltd., Guiyang, 550014, China
4. School of Aerospace Engineering, Xiamen University, Xiamen, 361102, China
5. School of Electrical Engineering and Automation, Xiamen University of Technology, Xiamen, 361024, China
6. The State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Overseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline Innovation, Xi'an Jiaotong University, Xi'an 710049, China
7. State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, 030051, P.R. China