Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching-Reference-Cited by-同舟云学术

Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

Published:2016 Issue:26 Volume:6 Page:21430-21434
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Balderas-Valadez R. F.¹²³⁴⁵,Agarwal V.¹²³⁴⁵,Pacholski C.⁶⁷⁸⁹

Affiliation:

1. CIICAp

2. UAEM

3. Av. Universidad 1001 Col. Chamilpa

4. Cuernavaca

5. Mexico

6. Department of New Materials and Biosystems

7. Max Planck Institute for Intelligent Systems

8. 70569 Stuttgart

9. Germany

Abstract

Metal-assisted chemical etching was exploited for fabricating a porous silicon double beam interferometer composed of pillars with large pores on top of a monolayer with smaller pores which can act as a sensing and reference channel, respectively.

Funder

Max-Planck-Gesellschaft

Bundesministerium für Bildung und Forschung

Consejo Nacional de Ciencia y Tecnología

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C5RA26816H

Reference24 articles.

1. Handbook of Porous Silicon, ed. L. Canham, Springer International Publishing, 2014

2. Photonic Crystal Sensors Based on Porous Silicon

3. Chemical and Biological Applications of Porous Silicon Technology

4. Effect of noble metal catalyst species on the morphology of macroporous silicon formed by metal-assisted chemical etching

5. Fabrication of ordered silicon nanopillars and nanowires by self-assembly and metal-assisted etching

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