Efficient multi-barrier thin film encapsulation of OLED using alternating Al2O3 and polymer layers

Author:

Wu Jie12345,Fei Fei12345,Wei Changting12345ORCID,Chen Xiaolian12345,Nie Shuhong12345,Zhang Dongyu12345,Su Wenming12345ORCID,Cui Zheng12345

Affiliation:

1. Printable Electronics Research Center

2. Suzhou Institute of Nano-Tech and Nano-Bionics

3. Chinese Academy of Sciences

4. Suzhou

5. People's Republic of China

Abstract

The work demonstrates the WVTR value of 3 dyads alternative 30 nm Al2O3 and 500 nm parylene C encapsulation structure is less than 10−5 g m−2 per day. And this TFE technology successfully applies for OLED device encapsulation.

Funder

Chinese Academy of Sciences

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

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