1. Key Laboratory for Thin Film and Microfabrication of the Ministry of Education
2. Department of Micro/Nano Electronics
3. School of Electronics, Information and Electrical Engineering
4. Shanghai Jiao Tong University
5. Shanghai 200240
6. Jiangsu Key Laboratory of Advanced Laser Materials and Devices
7. School of Physics and Electronic Engineering
8. Jiangsu Normal University
9. Xuzhou 221116
10. PR China