Analysing trimethylaluminum infiltration into polymer brushes using a scalable area selective vapor phase process-Reference-Cited by-同舟云学术

Analysing trimethylaluminum infiltration into polymer brushes using a scalable area selective vapor phase process

Published:2021 Issue:2 Volume:2 Page:769-781
ISSN:2633-5409
Container-title:Materials Advances
language:en
Short-container-title:Mater. Adv.

Author:

Snelgrove M.¹²³⁴^ORCID,McFeely C.¹²³⁴,Shiel K.¹²³⁴,Hughes G.¹²³⁴⁵,Yadav P.⁶⁷⁸⁴,Weiland C.⁹¹⁰¹¹¹²¹³,Woicik J. C.⁹¹⁰¹¹¹²¹³,Mani-Gonzalez P. G.¹⁴¹⁵¹⁶¹⁷¹⁸,Lundy R.⁶⁷⁸⁴^ORCID,Morris M. A.⁶⁷⁸⁴^ORCID,McGlynn E.¹²³⁴⁵,O’Connor R.¹²³⁴¹⁹

Affiliation:

1. School of Physical Sciences

2. Dublin City University

3. Dublin 9

4. Ireland

5. National Centre for Plasma Science and Technology

6. AMBER Research Centre and School of Chemistry

7. Trinity College Dublin

8. Dublin 2

9. Materials Measurement Science Division

10. Material Measurement Laboratory

11. National Institute of Standards and Technology

12. Gaithersburg

13. USA

14. Institute of Engineering and Technology

15. Department of Physics and Mathematics

16. Autonomous University of Ciudad Juárez

17. Chihuahua 32310

18. Mexico

19. Advanced Processing Technology Centre

Abstract

This work identifies the critical factors when developing a polymer brush vapor phase infiltration process, while also demonstrating the use of novel pyridines for area selective purposes.

Funder

Science Foundation Ireland

Publisher

Royal Society of Chemistry (RSC)

Subject

Microbiology

Link

http://pubs.rsc.org/en/content/articlepdf/2021/MA/D0MA00928H

Reference74 articles.

1. A brief review of atomic layer deposition: from fundamentals to applications

2. The use of atomic layer deposition in advanced nanopatterning

3. Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing