Tempered glass substrate effect on the growth of polycrystalline-silicon and its applications for reliable thin-film transistors-Reference-Cited by-同舟云学术

Tempered glass substrate effect on the growth of polycrystalline-silicon and its applications for reliable thin-film transistors

Published:2015 Issue:69 Volume:5 Page:55909-55913
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Park Jae Hyo¹²³⁴,Kim Hyung Yoon¹²³⁴,Seok Ki Hwan¹²³⁴,Chae Hee Jae¹²³⁴,Lee Sol Kyu¹²³⁴,Lee Yong Hee¹²³⁴,Kiaee Zohreh¹²³⁴,Joo Seung Ki¹²³⁴

Affiliation:

1. Department of Material Science and Engineering

2. Seoul National University

3. Seoul 151-742

4. Republic of Korea

Abstract

We investigated the unique growth behavior of metal-induced laterally crystallized polycrystalline-silicon under a tempered glass substrate and fabricated a stable thin-film transistor.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/RA/C5RA09194B

Reference30 articles.

1. Polysilicon TFT technology for active matrix OLED displays

2. Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization

3. Ultra-thin elevated channel poly-Si TFT technology for fully-integrated AMLCD system on glass

4. Scalable 3-D Fin-Like Poly-Si TFT and Its Nonvolatile Memory Application

5. Reliability Mechanisms of LTPS-TFT With $\hbox{HfO}_{2}$ Gate Dielectric: PBTI, NBTI, and Hot-Carrier Stress

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electron-Beam Crystallization of Thin Films of Amorphous Silicon Suboxide;Technical Physics Letters;2021-12-13

2. Femtosecond laser shockwave peening ablation in liquids for hierarchical micro/nanostructuring of brittle silicon and its biological application;International Journal of Extreme Manufacturing;2020-10-01

3. Structural characterization determination of silicon nanocrystals embedded in amorphous silicon nitride matrix from the effect of the light scattering;Optik;2019-02

4. Thermal Stress Effect on Nickel Silicide Seed-Induced Laterally Crystallized Polycrystalline-Silicon Thin-Film Transistors;Journal of Nanoscience and Nanotechnology;2016-09-01

5. Effect of Ultrathin Silicon Oxide Film for Enhanced Performance and Reliability of Metal-Induced Laterally Crystallized Thin-Film Transistors Using Silicon Nitride as a Gate Dielectric;ECS Journal of Solid State Science and Technology;2016