Highly conformal fabrication of nanopatterns on non-planar surfaces
Author:
Affiliation:
1. Department of Physics
2. Chalmers University of Technology
3. Göteborg, Sweden
4. IMEC
5. Kapeldreef 75
6. B-3001 Leuven, Belgium
7. University of Gothenburg
Abstract
Bottom-up large-scale nanopatterns are fabricated conformally onto highly non-planar substrates using colloidal lithography.
Funder
Seventh Framework Programme
Swedish Foundation for Strategic Research
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2016/NR/C6NR00749J
Reference39 articles.
1. SOFT LITHOGRAPHY
2. High-Resolution Soft Lithography: Enabling Materials for Nanotechnologies
3. High resolution patterning on nonplanar substrates with large height variation using electron beam lithography
4. Facile Colloidal Lithography on Rough and Non-planar Surfaces for Asymmetric Patterning
5. Photochemistry-Based Method for the Fabrication of SnO2 Monolayer Ordered Porous Films with Size-Tunable Surface Pores for Direct Application in Resistive-Type Gas Sensor
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Roadmap on photonic metasurfaces;Applied Physics Letters;2024-06-24
2. Carrier transport in bulk and two-dimensional Zn2(V,Nb,Ta)N3 ternary nitrides;Nanoscale;2024
3. Investigations on black silicon nanostructures fabricated by reactive ion etching on highly curved surfaces;Materials Science in Semiconductor Processing;2023-10
4. Antireflection Structures for VIS and NIR on Arbitrarily Shaped Fused Silica Substrates with Colloidal Polystyrene Nanosphere Lithography;Micromachines;2023-06-07
5. Progress and prospects for ultrathin solar cells;Nature Energy;2020-11-02
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3