1. Centre Suisse d'Electronique et de Microtechnique SA, Neuchâtel, Switzerland
2. MicroBioRobotic Systems Laboratory, Institute of Mechanical Engineering, EPFL, Lausanne, Switzerland
3. Macromolecular Engineering Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, Zurich, Switzerland
4. Institute for Mechanical Systems, Department of Mechanical and Process Engineering, ETH Zurich, Zurich, Switzerland
5. Laboratory of Biosensors and Bioelectronics, Institute for Biomedical Engineering, ETH Zürich, Zurich, Switzerland