1. School of Material Science and Engineering
2. Shanghai Jiao Tong University
3. Shanghai 200240
4. P.R. China
5. National Engineering Research Centre for Nanotechnology
6. Shanghai 200241
7. Key Laboratory for Thin Film and Microfabrication of the Ministry of Education
8. Department of Micro/Nano Electronics
9. School of Electronics
10. Information and Electrical Engineering