Wet-etching fabrication of flexible and transparent silicon frameworks for imperceptible wearable electronics-Reference-Cited by-同舟云学术

Wet-etching fabrication of flexible and transparent silicon frameworks for imperceptible wearable electronics

Published:2024 Issue:16 Volume:12 Page:5826-5835
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Wei Tingyu¹^ORCID,Shi Yihao¹,Zhang Bingchang²^ORCID,Ding Yu³,Qin Jiahao¹⁴⁵,Hu Xinyue¹,Yu Jia¹,Liu Ruiyuan³^ORCID,Zhang Xiaohong¹^ORCID

Affiliation:

1. Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, Jiangsu 215123, P. R. China

2. School of Optoelectronic Science and Engineering, Key Laboratory of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Laboratory of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, Jiangsu 215123, P. R. China

3. College of Energy, Soochow Institute of Energy and Material Innovations, Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province, Soochow University, Suzhou, Jiangsu 215123, P. R. China

4. Department of Materials Science and Engineering, Monash University, Clayton, VIC 3800, Australia

5. Suzhou Industrial Park Monash Research Institute of Science and Technology, Monash University, Suzhou, Jiangsu 215123, P. R. China

Abstract

This work proposes a method of low-cost alkali etching to fabricate single-crystalline silicon frameworks, which will promote the research and application of silicon-based imperceptible wearable electronics.

Funder

National Natural Science Foundation of China

Natural Science Foundation of Jiangsu Province

Suzhou Key Laboratory of Functional Nano and Soft Materials

Priority Academic Program Development of Jiangsu Higher Education Institutions

Higher Education Discipline Innovation Project

Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province

Publisher

Royal Society of Chemistry (RSC)

Link

http://pubs.rsc.org/en/content/articlepdf/2024/TC/D3TC04556K

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