Tungsten dichalcogenide WS2xSe2−2x films via single source precursor low-pressure CVD and their (thermo-)electric properties

Author:

Sethi V.1ORCID,Runacres D.2,Greenacre V.2ORCID,Shao Li2,Hector A. L.2ORCID,Levason W.2ORCID,de Groot C. H.1,Reid G.2ORCID,Huang R.1ORCID

Affiliation:

1. School of Electronics and Computer Science, University of Southampton, Southampton, SO17 1BJ, UK

2. School of Chemistry, University of Southampton, Southampton, SO17 1BJ, UK

Abstract

A series of novel single source precursors, [WECl4(E′nBu2)] (E = S or Se; E′ = S or Se), are developed in this work to deposit stoichiometric WS2xSe2−2x (0 ≤ x ≤ 1) binary and ternary thin films.

Funder

Engineering and Physical Sciences Research Council

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science,Renewable Energy, Sustainability and the Environment,General Chemistry

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