Combinatorial ALD for the growth of ZnO/TiO2nanolaminates and mixed ZnO/TiO2nanostructured films

Author:

Doyle Shóna1ORCID,Ryan Louise1,McCarthy Melissa M.12ORCID,Modreanu Mircea1,Schmidt Michael1,Laffir Fathima3,Povey Ian M.1ORCID,Pemble Martyn E.14ORCID

Affiliation:

1. Tyndall National Institute, University College Cork, Cork, Ireland

2. Department of Physics, University of Oxford, Clarendon Laboratory, Parks Road, Oxford, UK

3. Department of Chemical Sciences and Bernal Institute, University of Limerick, Limerick, Ireland

4. School of Chemistry, University College Cork, Cork, Ireland

Abstract

The importance of understanding the growth fundamentals of ZnO/TiO2nanolaminate structures deposited by atomic layer deposition is explored.

Funder

Science Foundation Ireland

Irish Research Council

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science,Chemistry (miscellaneous)

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