Room temperature fabrication of highly proton conductive amorphous zirconia-based thin films achieved through precise nanostructure control

Author:

Takayanagi Makoto12,Tsuchiya Takashi1ORCID,Nishioka Daiki12,Higuchi Tohru2,Terabe Kazuya1

Affiliation:

1. Research Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan

2. Department of Applied Physics, Faculty of Science, Tokyo University of Science, Katsushika, Tokyo 125-8585, Japan

Abstract

YSZ thin films with controlled microstructure were fabricated without annealing process. The microstructure strongly depended on the oxygen partial pressure during the deposition, and the proton conductivity also varied significantly.

Funder

Iketani Science and Technology Foundation

Japan Society for the Promotion of Science

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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