Facile nanopatterning of zirconium dioxide films via direct ultraviolet-assisted nanoimprint lithography-Reference-Cited by-同舟云学术

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Facile nanopatterning of zirconium dioxide films via direct ultraviolet-assisted nanoimprint lithography

Published:2011 Issue:3 Volume:21 Page:657-662
ISSN:0959-9428
Container-title:J. Mater. Chem.
language:en
Short-container-title:J. Mater. Chem.

Author:

Park Hyeong-Ho,Zhang Xin,Lee Soon-Won,Kim Ki-don,Choi Dae-Geun,Choi Jun-Hyuk,Lee Jihye,Lee Eung-Sug,Park Hyung-Ho,Hill Ross H.,Jeong Jun-Ho

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2011/JM/C0JM01403F

Reference38 articles.

1. Direct oxidation of hydrocarbons in a solid-oxide fuel cell

2. Effect of calcium salts on isosynthesis over ZrO2 catalysts

3. Sol–gel derived ZrO2–SiO2 highly reflective coatings

4. Characterization of luminescent praseodymium-doped ZrO2coatings deposited by ultrasonic spray pyrolysis technique

5. A New Patterning Method Using Photocatalytic Lithography and Selective Atomic Layer Deposition

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2. Stop and restart of polycondensation reactions of highly reactive sol–gel precursors for nanoscale surface molding;Materials Chemistry Frontiers;2023

3. Versatile Zirconium Oxide (ZrO2) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography;Materials;2022-08-15

4. Molecular Layer Deposition of a Hafnium-Based Hybrid Thin Film as an Electron Beam Resist;ACS Applied Materials & Interfaces;2022-06-02

5. An electric field-assisted photochemical metal–organic deposition allowing control of oxygen content for resistive switching in directly patterned TiOx films;Journal of the Korean Ceramic Society;2021-09-03

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