Tantalum complexes with all nitrogen coordination sphere: mixed amido-, imido-, guanidinato complexes of tantalum and their thermal behaviour
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Inorganic Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2005/DT/B503988F
Reference20 articles.
1. Electrochemical Behavior of Thin Ta3N5 Semiconductor Film
2. Chemical vapor deposition of tantalum nitride with tert-butylimino tris(diethylamino) tantalum and atomic hydrogen
3. Atomic layer deposition of tantalum nitride for ultrathin liner applications in advanced copper metallization schemes
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2. Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WN x C y Thin Films;European Journal of Inorganic Chemistry;2018-01-03
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