1. Department of Instrument Science and Engineering
2. School of Electronic Information and Electrical Engineering
3. Shanghai Jiao Tong University
4. Shanghai Engineering Research Center for Intelligent diagnosis and treatment instrument
5. Key Laboratory of Thin Film and Microfabrication Technology (Ministry of Education)
6. State Key Laboratory of Transducer Technology
7. Shanghai Institute of Microsystem and Information Technology
8. Chinese Academy of Sciences
9. Shanghai 200050
10. China