Soluble polycyclosilane–polysiloxane hybrid material and silicon thin film with optical properties at 193 nm and etch selectivity-Reference-Cited by-同舟云学术

Soluble polycyclosilane–polysiloxane hybrid material and silicon thin film with optical properties at 193 nm and etch selectivity

Published:2015 Issue:2 Volume:3 Page:239-242
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Park Sung Jin¹²³⁴⁵,Cho Hyeon Mo⁶⁴⁷⁸,Lee Myong Euy¹²³⁴⁵,Kim Miyoung⁹¹⁰¹¹⁸,Han Kwenwoo⁹¹⁰¹¹⁸,Hong Seunghee⁹¹⁰¹¹⁸,Lim Sanghak⁹¹⁰¹¹⁸,Lee Hansong⁹¹⁰¹¹⁸,Hwang Byeonggyu⁹¹⁰¹¹⁸,Kim Sang Kyun⁹¹⁰¹¹⁸,Shim Sangdeok¹²¹³¹⁴⁸,Kang Philjae¹⁵⁴¹⁶⁸,Choi Moon-Gun¹⁵⁴¹⁶⁸

Affiliation:

1. Department of Chemistry & Medical Chemistry

2. College of Science and Technology

3. Research & Education Center for Advanced Silicon Materials

4. Yonsei University

5. Wonju

6. University College

7. Incheon 406-840

8. Republic of Korea

9. Process Materials Development Team

10. Samsung SDI Co.

11. Suwon

12. Department of Chemistry

13. Sunchon National University

14. Sunchon

15. Department of Chemistry and Molecular Structure Laboratory

16. Seoul

Abstract

Silicon thin films that fulfil the needs of current semiconductor lithography were prepared from a new class of polycyclosilane–polysiloxane hybrid materials.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/TC/C4TC01917B

Reference35 articles.

1. K. Seshan , Handbook of Thin Film Deposition, Elsevier Science, 2012

2. G. Harbeke and M. J.Schulz, Semiconductor Silicon: Materials Science and Technology, Springer, London, 2011

3. B. G. Yacobi , Semiconductor Materials: An Introduction to Basic Principles, Kluwer Academic/Plenum Publishers, 2003

4. R. E. Hummel and K. H.Guenther, Handbook of Optical Properties: Thin Films for Optical Coatings, Taylor & Francis, 1995

5. Materials for and performance of multilayer lithography schemes

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