Affiliation:
1. Advanced Laser Technology Laboratory of Anhui Province, Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei, Anhui, 230026, China
Abstract
A high-precision metrology measurement technique based on the asymmetric excitation of BSWs is proposed to resolve the geometric size of nanowires. Experimentally, the transverse resolution of widths are about 4.38 nm and 6.83 nm.
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
Key Technologies Research and Development Program of Anhui Province
Fundamental Research Funds for the Central Universities
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy