1. Advanced Microelectronic Center Aachen (AMICA)
2. AMO GmbH
3. 52074 Aachen
4. Germany
5. Department of Mechanical Engineering and Applied Mechanics
6. University of Pennsylvania
7. Philadelphia
8. USA
9. Department of Mechanical Engineering
10. Department of Electrical Engineering
11. Pohang University of Science and Technology
12. Pohang
13. South Korea
14. IFW Dresden
15. D-01171 Dresden
16. NASA Ames Research Center
17. Moffett Field