1. MicroNano System Research Center
2. Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education
3. College of Information Engineering
4. Taiyuan University of Technology
5. Taiyuan 030024
6. School of Materials Science and Engineering
7. North University of China
8. Taiyuan 030051
9. P. R. China
10. Shanxi Province Key Laboratory of Functional Nanocomposites