CVD of MoS2 single layer flakes using Na2MoO4 – impact of oxygen and temperature

CVD of MoS₂ single layer flakes using Na₂MoO₄ – impact of oxygen and temperature–time-profile

Published:2023 Issue:46 Volume:15 Page:18871-18882
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Kalt Romana Alice¹^ORCID,Arcifa Andrea²,Wäckerlin Christian³⁴^ORCID,Stemmer Andreas¹

Affiliation:

1. Nanotechnology Group, ETH Zürich, Säumerstrasse 4, CH-8803 Rüschlikon, Switzerland

2. Surface Science & Coating Technologies, Swiss Federal Laboratories for Materials Science and Technology (EMPA), Überlandstrasse 129, CH-8600 Dübendorf, Switzerland

3. Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Station 3, CH-1015 Lausanne, Switzerland

4. Laboratory for X-ray Nanoscience and Technologies, Paul-Scherrer-Institute (PSI), CH-5232 Villigen PSI, Switzerland

Abstract

In-depth investigation of MoS2 flakes synthesized by CVD to derive insights on growth, process parameters, and detachability enabled by water.

Funder

Universität Zürich

Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2023/NR/D3NR03907B

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