Characterization of nano-porosity in molecular layer deposited films
Author:
Affiliation:
1. Department of Applied Physics
2. Eindhoven University of Technology
3. 5600 MB Eindhoven
4. The Netherlands
5. Holst Centre/TNO
6. Eindhoven
7. Solar Research SOLLIANCE
Abstract
A correlation was found between the MLD process conditions, the open-porosity relative content, and the degradation of metalcone layers.
Publisher
Royal Society of Chemistry (RSC)
Subject
Inorganic Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2018/DT/C8DT01246F
Reference40 articles.
1. Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition
2. Organic and inorganic–organic thin film structures by molecular layer deposition: A review
3. Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
4. Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol
5. Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD)
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