Design and performance of a multilayered mirror monochromator in the low-energy region of the VUV

Abstract

For the energy region from tens to hundreds of electron volts, the multilayered mirror (MLM) monochromator has never been realized due to the difficulty of reducing the background noise of the total reflection component, in spite of its usefulness in synchrotron radiation experiments. In this work, a double-crystal-type MLM monochromator equipped with a thin-film filter has been designed on the basis of trial fabrication of the mirror-driving system and of Mo/Si and Mo/C MLMs; its performance has been evaluated by calculating its output photon flux. It is shown that by using the MLMs at low incident angles, combined with an appropriate thin-film filter, it is possible to make a practical monochromator with high output photon flux and low background noise.