ICSC: a program for calculating inelastic scattering cross sections for fast electrons incident on crystals

Abstract

A computer program which calculates inner-shell ionization and backscattering cross sections for fast electrons incident on a crystal is presented. The program calculates the inelastic scattering coefficients for inner-shell ionization, pertinent to electron energy loss spectroscopy and energy dispersive X-ray analysis, using recently presented parameterizations of the atomic scattering factors. Orientation-dependent cross sections, suitable for atom location by channelling enhanced microanalysis, may be calculated. Inelastic scattering coefficients that allow the calculation of orientation-dependent annular dark-field and Rutherford backscattering maps are calculated using an Einstein model. In all cases, absorption due to thermal diffuse scattering, also calculated using an Einstein model, can be included.