Stress distribution and lattice curvature determinations in multilayer structures by simulation of X-ray rocking curves

Abstract

A mechanical model is presented for the calculation of the stress depth distribution and the curvature radius in multilayer crystalline structures. The model is compatible with the perpendicular strain and thickness determined for each lamella by simulation of a double-crystal X-ray rocking curve, and is suitable for coherence at all the interfaces as well as for coherence loss at one interface. An example of an application to a hypothetical practical case shows that the comparison between experimental and calculated curvatures and asymmetric rocking curves allows one to determine if loss of coherence occurred at an interface as a consequence of sample processing, and to determine the amount of incoherence and the depth position of the incoherent interface.