Characterization of ordered mesoporous films on silicon (001) surface using X-ray and electron diffraction

Abstract

A continuous silica film with well aligned mesochannels parallel to the Si(001) surface was found to be formed through sol–gel dip-coating of a silica precursor with nonionic ethylene oxide surfactant. Two two-dimensional mesoporous structures in centered and non-centered rectangular symmetries and with the short axes of elongated ellipsoidal pores normal to the surface were observed by X-ray and electron diffraction. Detailed transmission electron microscopy investigations were employed to view the direction dependence of the channel or pore packing in the continuous film.