X-ray topo-tomography studies of linear dislocations in silicon single crystals

Author:

Asadchikov VictorORCID,Buzmakov AlexeyORCID,Chukhovskii Felix,Dyachkova Irina,Zolotov DenisORCID,Danilewsky Andreas,Baumbach TiloORCID,Bode Simon,Haaga Simon,Hänschke Daniel,Kabukcuoglu Merve,Balzer Matthias,Caselle Michele,Suvorov ErnestORCID

Abstract

This article describes complete characterization of the polygonal dislocation half-loops (PDHLs) introduced by scratching and subsequent bending of an Si(111) crystal. The study is based on the X-ray topo-tomography technique using both a conventional laboratory setup and the high-resolution X-ray image-detecting systems at the synchrotron facilities at KIT (Germany) and ESRF (France). Numerical analysis of PDHL images is performed using the Takagi–Taupin equations and the simultaneous algebraic reconstruction technique (SART) tomographic algorithm.

Funder

Ministry of Education and Science of the Russian Federation

Bundesministerium für Bildung, Wissenschaft, Forschung und Technologie

Publisher

International Union of Crystallography (IUCr)

Subject

General Biochemistry, Genetics and Molecular Biology

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