Calculation of the sputtering coefficients of oxide films from the surface of a homogeneous material by medium-energy helium ions

Author:

Manukhin Vladimir1

Affiliation:

1. National Research University "MPEI"

Abstract

The paper presents an analytical model for sputtering two-component layered inhomogeneous targets by bombardment with light ions. An analytical formula is obtained that makes it possible to calculate the total and partial sputtering yields of a binary layer of target inhomogeneity by light ions. The obtained formula is used to calculate the sputtering yields of oxide layers from the surface of a homogeneous substrate. The calculation results are in good agreement with the computer simulation data.

Publisher

Joint-Stock Company Scientific and Production Association - ORION

Subject

General Physics and Astronomy

Reference10 articles.

1. M. K. Abe salomov, V. P. Afanas’ev, V. V. Manukhin, and S. D. Fedorovich, Tesisy Vsesouznogo covestchaniya chastitz

2. s kristallami / pod red. Prof. A. F. Tulinova. – M. MSU, 1989, p. 188 [in Russian].

3. S. Chandrasekhar, Radiative Transfer. (Oxford, Clarendon Press, 1950). 3. V. V. Manukhin, Tech. Phys., No. 52, 968 (2007).

4. V. V. Manukhin, Applied Physics, No. 5, 5 (2016) [in Russian].

5. V. V. Manukhin, Applied Physics, No. 6, 69 (2018) [in Russian]. 6. V. S. Remizovich, D. V. Rogozkin, and M. I. Ryazanov, Fluktuazii probegov zaryazennyh chastits. (Energo-

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3