Influence on Microstructure of BCN Films by Thermal Annealing in Air
Author:
Publisher
The Surface Finishing Society of Japan
Subject
General Engineering
Reference9 articles.
1. 1) H. Ahn, L. Alberts, J. Whole and K. T. Rie ; Surf. Coat. Technol., 142-144, 894 (2001).
2. Micromechanical properties of BN and B–C–N coatings obtained by r.f. plasma-assisted CVD
3. Structural and chemical analysis of amorphous B–N–C thin films deposited by RF sputtering
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